Chinese Academy of Sciences Develops Self-Driven Pressure Sensor Array Devices

August 10, 2023

[China Instrument Network Instrument R&D] Recently, researchers from the Beijing Institute of Nano Energy and Systems, Chinese Academy of Sciences, designed and prepared a self-driven pressure sensor array device that can realize full-scale pressure measurement. The device also has high pressure sensitivity. .

Self-Driven Optoelectronic Dual Mode Full-Scale Pressure Sensing Array Device Prepared by Beijing Nano Energy
In recent years, with the rapid development of the mobile Internet, various smart terminal products have attracted widespread attention. Smart devices such as smart wristbands, smart glasses, smart furniture and other interconnected devices with sensing and driving functions have been intelligently identified and managed with the help of the Internet of Things. They not only become a fashion symbol that enriches people's lives, but also greatly facilitates people's lives. People also believe that these products will have new applications and breakthroughs in the fields of human-computer interaction, electronic skin, and health care. As one of the important components, the personalized design of the pressure sensor and its high-performance acquisition become particularly important in order to meet the needs of practical applications. In particular, the device's pressure sensitivity, measurement limits, and pressure measurement range are key factors that determine the actual application of a device. For example, in the touch panel of a mobile phone in daily life, it can sense a contact of 1 kPa or more and can perform imaging of the trajectory. However, there are few products or devices whose corresponding working range can cover the pressure range from kPa to MPa that occurs in daily life.

At present, although new pressure sensors based on different physical conduction mechanisms, including piezoresistive, capacitive, and piezoelectric, have made significant achievements and breakthroughs in device performance, they can only work within a limited measurement range. For example, most piezo-resistive or piezo-conducting pressure sensors with higher pressure sensitivity can detect ultra-low pressure (< 1 Pa) like sound pressure, vibration, etc., but their working range is often small. The basic rating is less than 10 kPa. Conversely, pressure transducers based on capacitive conductance tend to have larger operating ranges, but their pressure sensitivity is not as high as that of piezoresistive devices.

In collaboration with the Institute of Nano Energy and Systems, Chinese Academy of Sciences, Pan Caofeng and Wang Zhonglin, based on the phenomenon of electroluminescence and two different physical sensing mechanisms of frictional nanogenerators, the modules of these two different sensing mechanisms are integrated into the same device. A self-driven pressure sensor array device that can achieve full-scale pressure measurement is designed and prepared. At the same time, the device also has a high pressure sensitivity. By building a device signal processing system, the device's dynamic stress monitoring, imaging and optimization are completed. The research results were recently published in Advanced Materials (DOI: 10.1002/adma.201605817).

Researchers designed and prepared a self-driven full-scale pressure sensor array device with 100 × 100 resolution and 100 dpi, based on the above two different sensing mechanisms, to achieve full-scale pressure measurement. By surface modification of the PDMS electrode, the device has adjustable pressure sensitivity and adjustable measurement range. The pressure sensitivity of the device in the range of 0.6 kPa to 200 kPa is 6 MPa-1; the pressure sensitivity in the range of 650 kPa to 30 MPa is 0.037 MPa-1. The device has both electrical and optical signals that can simultaneously perform digital imaging simulations and visual observations. Such full-scale stress measurement devices will have broad application prospects in the era of digitalization, information, and networking, and will also provide new thinking for information security in the fields of communications, e-commerce, and e-government.

(Original title: Self-Driven Optoelectronic Dual Mode Full-Scale Pressure Sensing Array Device Prepared by Beijing Nano Energy

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